ȣ

Spec.

1

 1) 350watt UV light source & Intensity controllable power supply

 2) Beam

      a. Size : 4*4 inch (over)

      b. Power: 25mW/

      c. Beam Uniformity: 3%

 3) Substrate Size : Piece~4"

 4) Exposure Mode : Soft, Hard, Vacuum & Proximity Contact

 5) Exposure Optics : I, G, H-line

 6) Alignment : Top Side Alignment

 7) Alignment Stage : X, Y:±10mm̻, Theta:±5̻ , Z: 5mm ̻

 8) Exposure time : 0 ~ 999 sec, min, hour (0.1 step)

 9) Utilities Requirement

      - Electric Power

           : 220V, 10A, Single PhaseWith Ground, 60Hz

      - Nitrogen : 0.2 Mpa

      - OFA : 0.5 Mpa

      - Vacuum : -600mmHg

      - Exhaust : No

 10) 1000mm*1000mm ̻ Work Table ʿ

Exposure & Mask Alignment system MDA-400M (MIDAS SYSTEM)

2

 * UV intensity(Typ.) - 4500 mW/ Typ. (at 365nm, -01 type)

 * Power Supply Input - 100V ac to 240 V ac

                                   single phase 47Hz to 63 Hz

 * Weight - Approx. 6.5 kg

ESPOT UV (()ſ)

3

 * Dual PID outputs for heating and cooling

 * Easy to use auto-tune PID parameters

 * Programmable control from -190°C to 1500°C

 * RS232 Com Port and WinTemp Software included

 * Free LabVIEW driver for RS232

 * Compatible with all Instec hot and cold stages, chucks, and     plates - controller cannot be switched to use with different                  stage/chuck/plate model

 * Optional IEEE port with sample LabVIEW driver

 * : LC µ ȭ

Standalone Temperature Controller (INSTEC Inc., STC200)

4

  Muffle Furnace

   1)Chamber volume: 4.5L

   2)Temperature:

        -Working range: up to 1050

        -Accuracy: ±2% of setting temperature

        -Sensor: K type

        -Controller: program controller

   3)Material:

        -Internal: Molded ceramic block

        -External: Double paint and baked

        -Insulation: Ceramic wool

   4)Heater: 3000W

   5)Safety: Over temp. limit, NFB

   6)Dimension(WxDxH)

        -Internal: 150x300x100mm

        -External: 400x420x530mm

   7)Electric requirement: 220V,60Hz

Muffle Furnace (MF-20S)

5

 * Type : Stirrer / Hot Plate

 * Power (Volts / Hz / Watts / Ampere)

     : 230 V/ 50 Hz / 698 W / 3.0 A

 * Temp Range : 5°C ~ 550°C (41°F ~ 1022°F)

 * Stir Range(RPM) : 60 ~ 1150 rpm

 * Weight : 3.2 kg (7.0 Ibs)

 * Top Plate Size Inches(Millimeters) : 5" x 7" (12.7 x 17.8 cm)

 * Product Dimensions Inches(Millimeter)

     : 4.25 x 7.75 x 11" (10.8 x 19.7 x 28 cm)

 * 뵵 :

Laboratory Stirrer / Hot Plate (Corning Inc., PC-420D)

6

 * Dual PID outputs for heating and cooling

 * Easy to use auto-tune PID parameters

 * Programmable control from -190°C to 1500°C

 * RS232 Com Port and WinTemp Software included

 * Free LabVIEW driver for RS232

 * Compatible with all Instec hot and cold stages, chucks, and     plates controller cannot be switched to use with different     stage/chuck/plate model

 * Optional IEEE port with sample LabVIEW driver

 * : LC µ ȭ

Standalone Temperature Controller (INSTEC Inc., STC200)

7

 * ļ : 40 kHz +- 1 kHz

 * : 50 W

 * µ : 150 °C ~ 400 °C

 * :

 * : 110 W

 * : 200 W

 * : 220 V / 50~60 Hz

 * ũ : 250 x 310 x 135 mm

 * : 8.0 kg

 * εα ũ : 35 mm, 300 mm

 * εα : 500 g

 * εα ȥ ũ : ִ 6 mm

 * : ĸ ̿

Ultrasonic Soldering Iron (Mechanism Electronic Control Service (MECS), MR-540S

8

 * Optical Breadboard

 * Helium-Neon Laser (Red or Green ray)

 * Polarizers Set

 * Optical Sample (e.g. LC cell, optical plate, etc.)

 * Photodetector (Photodiode)

 * Photoelastic Modulator (PEM)

 * Multifunction Digital Lock-In Amplifier

 * Arbitrary / Function Generator

 * Digital Phosphor Oscilloscope

 * : LC Ʈ

Optical Measurement System

9

 * Number of channels : 2

 * Connectors : Two BNC receptacles

                  (AUX IN1 /OUT1 and AUX IN2 / OUT2 on rear panel)

 * Power output to preamplifier : +- 24 V, +- 50 mA

 * Setting memories : 9

 * Initializing function : Returns to specified initial setting

 * Key lock : On / Off

 * Lamp control : On / Off

 * Fan control : On / Off

 * Power supply voltage range : 100 / 120 / 230 V +- 10 %

 * Power supply frequency range : 50 / 60 Hz +- 2 Hz

 * Power consumption : 50 VA maximum

 * Temperature / humidity range for performance guarantee

   : 0 to + 40 degrees Celsius, 10 to 95 % RH

     (no dew condensation)

     Some of specifications limit the temperature range

 * Storage temperature / humidity range

   : - 10 to + 50 degrees Celsius, 10 to 85 %RH

     (no dew condensation)

 * Outer dimensions : 434(W) x 132.5(H) x450(D) mm

                                (excluding protruding portions)

 * Mass : Approx. 10 kg

 * : ϴ ̼ ȣ

Multifunction Digital Lock-In Amplifier (NF Corp., LI 5640)

10

* Configuration

- PEM-100 Controller

- Optical Head (I/FS50)

- Electronic Head

- Photodiode (Detector / Preamplifier) (DET-100-002)

- Signal Conditioning Unit (SCU-100)

 

 * PEM-100 Controller

 - 'f' display range / resolution 

      : 20 kHz ~100 kHz, 1 Hz or 0.001 kHz

 - '2f' display range / resolution

      : 40 kHz ~200 kHz, 1 Hz or 0.001 kHz

 - Retardation units : wavelength, radian, or degree

 - Size : 8.43 W x 4.27 H x 13 D

            (214.1 mm W x108.5 mm H x 330.2 mm D)

 - Weight : 6 Lbs (2.72 kg)

 * Optical Head

 - Optical material : Fused Silica

 - Nominal frequency : 50 kHz

 - Retardation range

   -- Quarter wave : 170 nm ~ 2 um

   -- Half wave : 170nm ~ 1um

   -- Useful aperture : 16 mm

 

 * Photodiode

 - Type : Si-PC (Silicon-Photoconductive)

 - Spectral range : 350 nm ~ 950 nm

 - Active area : 16 mm^2

 - Surface diameter : 4.57 mm

 - NEP at response peak : 1.9e-14 w/sqrt(Hz)

 - Frequency response : DC - 1.0 MHz

 - -3dB Measured bandwidth : DC to 1.05 MHz

 - Output voltage at saturation : 3.3 V

 - Size (cylindrical) : 2.492 " diameter x2.362 " long

                              (63.3 mm diameter x 60 mm long)

 - Weight : 1 Lb

 

 * Signal Conditioning Unit

 - AC component : 10 V AC peak to peak, maximum

 - DC component : 0 to 10 V DC

 - Signal input impedance : 1 M ohm

 - AC gain settings : 0.1, 0.2, 0.5, 1, 2, 5, 10, 20

 - AC bandwidth : 10 kHz ~ 200 kHz

 - AC output satuation level : 1 V AC rms

 - AC output load impedance, minimum : 10 k ohms

 - AC signal input to output phase shift

       : 18degrees maximum, typical

 - DC offset : Less than 1 mV

 - DC gain settings : 1, 2, 5, 10, 50, 100, 200, 500, 1000

 - DC bandwidth : 10 kHz ~ 200 kHz

 - AC output satuation level : 10 V DC

 - DC output load impedance, minimum : 10 k ohms

 - Detector power output voltage range : 8.55 ~ 9.45 V DC

 - Maximum detector power output current : 150 mA

 * : LC 󹰿 phase retardation ֱ ȭ

Photoelastic Modulator (PEM) (Hinds Instruments, PEM-100)

11

 * Wavelength : 632.8 nm (Red Ray)

 * Maximum output power : 15 mW

 * Minimum CW power output at 632.8 nm TEM00 : 4 mW

 * Beam diameter (1 / e^2) : 0.8 mm

 * Beam divergence (full) : 1 mrad

 * Polarization ratio : Random

 * Longitudinal mode spacing : 438 MHz

 * Weight : 0.56 kg

 * Operating current (nominal) : 6.5 mA

 * Operating voltage : 2390 V DC +- 100

 * CDRH class : IIIB

 * : LC

Helium-Neon Laser (Red) (Melles Griot, Helium-Neon Laser System 05-LHR-141 & 05 LPL 340-065)

12

 * Wavelength : 632.8 nm (Red Ray)

 * Maximum output power : 15 mW

 * Minimum CW power output at 632.8 nm TEM00 : 4 mW

 * Beam diameter (1 / e^2) : 0.8 mm

 * Beam divergence (full) : 1 mrad

 * Polarization ratio : Random

 * Longitudinal mode spacing : 438 MHz

 * Weight : 0.56 kg

 * Operating current (nominal) : 6.5 mA

 * Operating voltage : 2390 V DC +- 100

 * CDRH class : IIIB

 * : LC * Wavelength : 534 nm (Green Ray)

 * Minimum output power : 0.5 mW

 * Maximum output power : 5.0 mW

 * Mode structure : TEM00 > 99 %

 * Beam diameter : 0.72 mm

 * Beam divergence : 0.96 mrad

 * Length : 425.5 +- 1.0 mm (16.75 +- 0.04 ")

 * Diameter : 44.5 +- 0.5 mm (1.75 +- 0.02 ")

 * Weight : 650 g

 * Longitudinal mode spacing : 416 MHz

 * Noise (30 Hz ~ 10 MHz) : < 1 % rms

 * Starting voltage : < 10 kV DC

 * Operating volage : 2200 V DC

 * Series resistors in housing : 94 k ohm

 * Operating current : 5.25 mA

 * Recommended power supply : LPS or CPS

 * : LC

Helium-Neon Laser (Green) (Research Electro-Optics, Helium-Neon Laser System 30968 & S-22-LI

13

* Lattice interval : 25 mm

* Board size : 1195 mm x 595 mm

                    (Total latticesize : 1175 mm x 575 mm)

* : LC Setting

Optical Breadboard (Newport)

14

* PID Controller(Program Model)

* Fan Motor

* Door

* Back-up Device

* Safety Device

* Order Made

* : LC Cell Baking

* Lattice interval : 25 mm

Drying Oven (Sejong Science Industrial Plus)

15

 * : AC 220 V, 50/60 Hz

 * Һ : 350 W

 * ǥâ : Digital display (7-Segment x2)

 * : BLT type

 * ð : 0~99 min

 * µ : 0~50 °C

 * ļ : 40 kHz

 * : 5.7 L

 * ġ(LxWxH) : 295 x 150 x 150 (mm)

 * ġ(LxWxH) : 500 x 285 x 255 (mm)

 * ߷ : 7 kg

 * : LC Cell ô ȥ

Ultrasonic Cleaner (Hwashin Instrument, Power Sonic 405)

16

 * Channels : 2

 * Displa(Full VGA LCD) : color

 * Bandwidth : 100 MHz

 * Rise time : 3.5 ns to 600 ps

 * Sample rate per channel : 1.25 GS / s

 * Oscilloscope type  - DPO up to 3600 wfms / scontinuous                                      waveform capture rate

 * Record length(maximum) : 10 kB

 * Trigger types - edge, logic(pattern, state), pulse(glitch,                               width, runt, slew rate), video, comm

 * Battery operation - optional 3 hours with one Li-ION battery

 * Connectivity and storage - RS-232, GPIB, centronics, floppy                                            disk, LAN(10 Base - T ethernet)

 * Waveform math and analysis - simple waveform math, FFT,                                                    arbitrary expression math

 * : LC Cell, Panel ȣ

Digital Phosphor Oscilloscope (Tektronix, TDS3012B)

17

 * Wideband from DC to 1 MHz

 * High output, high speed Output voltage

    : 150Vpp (DC to 100 kHz) 130 Vpp (100 kHz to 1 MHz) Through        rate : 650 V / us typ

 * Optimal waveform response - Overshoot, sag 5% or less

 * Variable gain : 10 to 300 times - x10, x20, x50, x100 and x1, to                                                   x3 continuously variable

 * Input : 2-line input allows 2-line additions

 * Low output impedance : 0.2 ohm + 1 uH typ

 * DC addition capability - +/- 50 V 10-rotation potentiometer     setting

 * High balanced output capability

 * Protection circuit with overload display

 * Input / output connecter

 * : LC Cell, Panel ΰ ȣ

High Speed Bipolar Amplifier (NF Corp., HSA4011)

18

 * Computer-based control

 * Size : 10 cm x 10 cm

 * : 10 x 10 Size Cell

Scriber (Neo System)

19

 * 뵵 : LC Cell

Asembler (Neo System)

20

 * Input voltage : 120 ~ 240 V AC, 50 / 60 Hz

 * Input power : 12 W

 * Output power : 25 mW / cm  at 365 nm

 * Area of exposure : 5" x 13/4" (12.71 cm x 4.45 cm)

 * : UV ȭ ȭ

UV Exposure Machine (Midas System & Electric Light Corp., Electro-Lite Bondwand & UV Light)

21

 * Step states : recipe -> 20 ea, 50 steps control

 * Bowl size : 12 inch, SUS

 * Vacuum chuck : 1/2", 1", 2", 4", 6"

 * Dimension : 390 x 570 x 280 [mm]

 * Control speed : 300 ~ 7000 rpm

 * Time : variable 0.1 ~ 999 sec

 * Vacuum pressure : 650 mmHg

 * Electrical power : ܻ, 220 V, 5 A

 * : Cell ׻ ( , ) Spin Coating

Spin Coater (Midas System, Spin-3000D)

22

 * Measurable wavelength : 350 ~ 970 nm

 * : LC Cell, Panel б ( ̰濡 )

Spectrometer (Sesim Photonics Technology, SPTR-100)

23

 * Computer-based control

 * Size : 10 cm x 10 cm

 * : LC Cell UV ȭ Sealing

Sealing Dispenser (Neo System, Dispenser Control System)

24

 * 뵵 : LC Cell Alignment Layer (PI; Polyimide) Rubbing

Rubbing Machine (Namil Optical Components)

25

 * Computer Set

 * Polarizing Microscope

 * Spectrometer

 * Arbitrary / Function Generator

 * Programmable DC Power Supply

 * High Speed Bipolar Amplifier

 * Digital Phosphor Oscilloscope

 * : LC Cell, Panel Ʈ

LC Cell (or Panel) Sample Measurement System

26

 * Dimension &Weight : 280(W) x 460(D) x 590(H) mm, 17 kg

 * Input power supply voltage : AC 100 ~ 240 V ± 10 % 50 / 60 Hz

    - Current consumption -> 2.4 A or less

    - Internal fuse rating -> 250 V, T4A

 

 * Focusing mechanism  - Fine focus knob scale

     : 1 step equals 1m

         - Amount of movement of fine focus knob : One turn moves             the stage up or down by 0.1 mm

        - Amount of movement of coarse focus knob : One turn             moves the stage up or down by about 12 mm

        - Range of stage vertical motion : 2 mm up and 23 mm             down from the reference (focused) position

 

 * Illumination

        - Internal Koehler-type diascopic illumination optics

       - Provided with a PHOTO switch (5-level fine adjustment           selector)

       - Lamp rating : 12 V DC, 100 W halogen lamp (Osram                                  HLX64623 or Philps 7724)

 

 * : LC Cell, Panel ( ݻ 带 ̿             ,

Polarizing Microscope (Nikon, Eclipse E600W Pol & DMCe)

27

 * Output range

   - P1 : 0 ~ 30 V, 0 ~ 5 A

   - P2 : 0 ~ 30 V, 0 ~ 5 A

 * Ripple &noise

    - P1 : <3 mVpp, <1 mArms

    - P2 : <4 ~ 8 mVpp, <1 mArms

 * Load &line regulation

    - P1 : 0.01 % + 2 mV, 0.01 % + 0.2 mA

    - P2 : 0.01 % + 2 mV, 0.01 % + 0.2 mA

 * Voltage programming speed

    - P1 : up < 12 ms, down < 15 ms

    - P2 : up < 12 ms, down < 15 ms

 * ɾ ó ӵ : 50 ~ 100 ms ̳ (° - < 50 ms, ϴ ɾ - <100 ms)

 * ° ǥ : 1 mV( 60 V ̻ : 10 mV), 1 mA

 * ±(% of output + offset)

    - P1 : 0.02 % + 2 mV

    - P2 : 0.1 % + 2 mV

 * : LC Cell, Panel DC ΰ

Programmable DC Power Supply (VuPower, IPS-30B05DD)

28

 * Channels : 2

 * Sine : 25 MHz

 * Pulse : 12.5 MHz

 * Memory : 2 ~ 65536 bytes

 * Sampling rate : 250 MS/s

 * Amplitude : 10 Vpp

 * Display : Color

 * Interface : USB

 * 25 MHz ~ 240 MHz Լ ߻

 * 12.5 MHz ~ 120 MHz ޽ ߻

 * 14Ʈ ߻

 * ArbExpress Ʈ

 * 뵵 : LC Cell, Panel Լ ޽ ȣ(AC ) ΰ

Arbitrary/Function Generator (Tektronix, AFG3022)

29

* 뵵 : Spin Coating Cell Baking

Hot Plate (Namil Optical Components)

30

 * Maximum capacity : 120 g

 * Maximum capacity, fine range : 41 g

 * Readability : 0.1 mg

 * Readability, fine range : 0.01 mg

 * Balance dimensions (W x D x H) [mm] : 263 x 453 x 322

 * Usable height of draft shield : 235 mm

 * Weighing pan dimensions (W x D) [mm] : 78 x 73

 * ġũ Ʈ ÷

 * ڵ (FACT)

 * :

Electronic Scale (Mettler Toledo, XS105 DualRange)

31

 * Available press pressure : 10.000 kg (Maximum)

 * Available press time : xxxx min

 * Available post press time : xxxx pps

 * : LC Cell

Cold Press Machine (Neo System)